Small-sized KrCl, XeCl, and XeBr excilamps

Mikhail V. Erofeev; N. L. Medvedev; Edward A. Sosnin; Victor F. Tarasenko

doi:10.1117/12.563013

3 May 2004 Small-sized KrCl, XeCl, and XeBr excilamps

Mikhail V. Erofeev, N. L. Medvedev, Edward A. Sosnin, Victor F. Tarasenko

Proceedings Volume 5483, Atomic and Molecular Pulsed Lasers V; (2004) https://doi.org/10.1117/12.563013
Event: Atomic and Molecular Pulsed Lasers V, 2003, Tomsk, Russian Federation

Abstract

Simple configuration small-sized KrCl-, XeBr- and XeCl-excilamps based on near-surface capacitive discharge are offered. The devices are demonstrated to possess high specific energy characteristics (radiation power density of up to 10 mW/cm²), permanently small radiation volume, as well as narrow radiation band. Operating lifetime of a sealed-off excilamp is above 1000 hrs.

Citation Download Citation

Mikhail V. Erofeev, N. L. Medvedev, Edward A. Sosnin, and Victor F. Tarasenko "Small-sized KrCl, XeCl, and XeBr excilamps", Proc. SPIE 5483, Atomic and Molecular Pulsed Lasers V, (3 May 2004); https://doi.org/10.1117/12.563013

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