Silicon-based guided-mode resonance nanophotonic device

Chih Ming Wang; Che Lung Xu; Jenq Yang Chang; Chien Chieh Lee

doi:10.1117/12.559209

8 October 2004 Silicon-based guided-mode resonance nanophotonic device

Chih Ming Wang, Che Lung Xu, Jenq Yang Chang, Chien Chieh Lee

Proceedings Volume 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices; (2004) https://doi.org/10.1117/12.559209
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

An out-of-plane guided-mode resonance (GMR) filter on a single Si chip using a two-layer polysilicon surface micromachining process was proposed. To the best of our knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon microoptical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550nm and 1310nm could be as low as 40dB and the channel passband at 1550nm was 20nm.

Citation Download Citation

Chih Ming Wang, Che Lung Xu, Jenq Yang Chang, and Chien Chieh Lee "Silicon-based guided-mode resonance nanophotonic device", Proc. SPIE 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices, (8 October 2004); https://doi.org/10.1117/12.559209

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