LVDT calibration using a phase modulation optical interferometer calibrated by an x-ray interferometer

Jin Won Park; Jae Gun Jo; Sang Ho Byun; Jeong Eun Kim; Cheon Il Eom

doi:10.1117/12.563895

2 August 2004 LVDT calibration using a phase modulation optical interferometer calibrated by an x-ray interferometer

Jin Won Park, Jae Gun Jo, Sang Ho Byun, Jeong Eun Kim, Cheon Il Eom

Proceedings Volume 5532, Interferometry XII: Applications; (2004) https://doi.org/10.1117/12.563895
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We have calibrated an LVDT using an optical and x-ray interferometer. We have calibrated optical interferometer using x-ray interferometer. The LVDT has calibrated by the optical interferometer. We made the monolithic x-ray interferometer with a double parallel spring structure for the translation of an analyzer lamella. One period of the x-ray interference fringe corresponds to the lattice parameter, 0.192 nm. The nonlinearity of optical interferometer has been calibrated by an x-ray interferometer. We have used a phase modulation optical interferometer. This calibration using the x-ray interferometer is directly traceable to primary standards. We have achieved the resolution of an x-ray interferometer and optical interferometer better than 0.01 nm. The optical phase stability of the interferometer is less than ± 150 pm. For the control of environmental temperature, we have used PID method. PID controller controlled the temperature inside chamber. Temperature drift was less than ± 3 mK (k = 2).

Citation Download Citation

Jin Won Park, Jae Gun Jo, Sang Ho Byun, Jeong Eun Kim, and Cheon Il Eom "LVDT calibration using a phase modulation optical interferometer calibrated by an x-ray interferometer", Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); https://doi.org/10.1117/12.563895

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