Mechanical bonding of two identical silicon planar refractive lenses

Vyacheslav Yunkin; Maxim V. Grigoriev; Serguei Kuznetsov; Anatoly A. Snigirev; Irina I. Snigireva

doi:10.1117/12.564872

4 November 2004 Mechanical bonding of two identical silicon planar refractive lenses

Vyacheslav Yunkin, Maxim V. Grigoriev, Serguei Kuznetsov, Anatoly A. Snigirev, Irina I. Snigireva

Proceedings Volume 5539, Design and Microfabrication of Novel X-Ray Optics II; (2004) https://doi.org/10.1117/12.564872
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Si planar refractive lenses are well known and used for microfocusing and collimating synchrotron radiation. We have developed a method of X-ray lens bonding that allow to gain in a depth aperture of linear planar lenses by factor 2. Two identical Si refractive lenses were placed face-to-face with alignment precision of 3 μm and fixed by clamp. This lens system with total depth aperture of 200 μm has been tested on BM05 (ESRF, Grenoble, France) at 20 keV. Linear focusing with full width at half maximum of 8 μm and gain of 9 was measured at the distance of 270 cm from the lenses.

Citation Download Citation

Vyacheslav Yunkin, Maxim V. Grigoriev, Serguei Kuznetsov, Anatoly A. Snigirev, and Irina I. Snigireva "Mechanical bonding of two identical silicon planar refractive lenses", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); https://doi.org/10.1117/12.564872

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