Ablation plume movement in a pulsed laser deposition system

Aurelian Marcu; Constantin Grigoriu; V. Cristea; Kiyoshi Yatsui

doi:10.1117/12.582833

21 October 2004 Ablation plume movement in a pulsed laser deposition system

Aurelian Marcu, Constantin Grigoriu, V. Cristea, Kiyoshi Yatsui

Proceedings Volume 5581, ROMOPTO 2003: Seventh Conference on Optics; (2004) https://doi.org/10.1117/12.582833
Event: ROMOPTO 2003: Seventh Conference on Optics, 2003, Constanta, Romania

Abstract

A novel three-dimensional model has been proposed for simulating pulsed laser ablation plume behvior and 'micron-sized particles' movement. It describes the plume expansion in vacuum or into an environmental gas. The model combined the advantages of Monte-Carlo and Finite Element methods, being able to give a detailed image of particles behavior, both from microscopic and macroscopic points of view. The particle interaction with obstacles is aimed to provide us a more comprehensive understanding of Pulsed Laser Deposition (PLD) techniques, with the final objective of obtaining droplets-free surfaces.

Citation Download Citation

Aurelian Marcu, Constantin Grigoriu, V. Cristea, and Kiyoshi Yatsui "Ablation plume movement in a pulsed laser deposition system", Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); https://doi.org/10.1117/12.582833

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