Doped 0.5mol% Er2O3 and (2,4,5,6)mol% MgO in LiNbO3 crystal, Mg:Er:LiNbO3 crystals were grown by Czochralski technique. The IR transmission spectra of those crystals were measured. The OH- absorption peak of Mg(2mol%):Er:LiNbO3 and Mg(4mol%):Er:LiNbO3 at about 3486 cm-1,while that of Mg(5mol%):Er:LiNbO3 and Mg(6mol%):Er:LiNbO3 at about 3535 cm-1. The shifting mechanism of OH- absorption peak was discussed based on the Li-site vacancy model. Using m-line method tested the photodamage of Mg:Er:LiNbO3 waveguide substrate. The photodamage resistant ability of Mg:Er:LiNbO3 is higher than that of Er:LiNbO3. The photodamage resistant ability of Mg(5mol%):Er:LiNbO3 waveguide substrate improves two orders than that of Er:LiNbO3.
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