Noncontact thickness measurement of metal foil by means of differential white light interferometry

Yanli Du; Huimin Yan; Yong Wu; Xiaoqiang Yao; Yongjun Nie; Baixuan Shi

doi:10.1117/12.576056

10 February 2005 Noncontact thickness measurement of metal foil by means of differential white light interferometry

Yanli Du, Huimin Yan, Yong Wu, Xiaoqiang Yao, Yongjun Nie, Baixuan Shi

Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.576056
Event: Photonics Asia, 2004, Beijing, China

Abstract

A new differential white light interference technique for the thickness measurement of metal foil is presented. In this work, the differential white light system consists of two Michelson Interferometers (MI) in tandem, of which reflective surfaces measured are corresponding surfaces of metal foil. Therefore, the measured result only relates to the thickness but not to the position of metal foil. The method is non-contact, non-destructive, has advantage of high accuracy, fast detection and compact structure. Theoretical analysis and preliminary experimental results have shown that the technique can measure the thickness of foil in the range of 1 μm to 80 μm with satisfactory accuracy and repeatability.

Citation Download Citation

Yanli Du, Huimin Yan, Yong Wu, Xiaoqiang Yao, Yongjun Nie, and Baixuan Shi "Noncontact thickness measurement of metal foil by means of differential white light interferometry", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.576056

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