Paper
22 January 2005 Rapid processing of replication tools with high-aspect-ratio microchannels for microfluidics
Reinhold Jurischka, Christoph Blattert, Isam Tahhan, Claas Mueller, Andreas Schoth, Wolfgang Menz
Author Affiliations +
Abstract
Microfluidic devices are mainly used within the life sciences or chemical analysis. Polymers are ideally suited for these applications due to their physical and chemical properties. In this report, we describe a rapid low cost processing technology to fabricate mold inserts for microfluidic structures with high aspect ratio, as well as excellent surface quality and high hardness. These tools are used for hot embossing and as mold inserts for injection molding. They enable cost effective structuring of technical polymers like polycarbonate or cycloolefin copolymer. The main advantage of our approach is the availability of the geometry and the specific target material right from the start of the evaluation process of microfluidic devices. The process described enables a rapid prototyping for the development and evaluation of different microfluidic devices, and they can be used for a low-cost mass production of micro structured parts.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Reinhold Jurischka, Christoph Blattert, Isam Tahhan, Claas Mueller, Andreas Schoth, and Wolfgang Menz "Rapid processing of replication tools with high-aspect-ratio microchannels for microfluidics", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); https://doi.org/10.1117/12.590549
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Polymers

Microfluidics

Nickel

Electroplating

Semiconducting wafers

Coating

Polishing

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