Integrated planar lightwave bio/chem OEIC sensors on Si CMOS circuits

Nan Marie Jokerst; Martin A. Brooke; Sang-Yeon Cho; Mikkel Thomas; Jeffrey Lillie; Daeik Kim; Stephen Ralph; Karla Dennis; Benita Comeau; Cliff Henderson

doi:10.1117/12.592771

7 March 2005 Integrated planar lightwave bio/chem OEIC sensors on Si CMOS circuits

Nan Marie Jokerst, Martin A. Brooke, Sang-Yeon Cho, Mikkel Thomas, Jeffrey Lillie, Daeik Kim, Stephen Ralph, Karla Dennis, Benita Comeau, Cliff Henderson

Author Affiliations +

Proceedings Volume 5730, Optoelectronic Integration on Silicon II; (2005) https://doi.org/10.1117/12.592771
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

Optical sensing, and the integration of sensors and electronics into Sensor on a Chip and Sensor on a Package systems are an approach to the creation of miniaturized, portable, customizable, low cost sensor systems for rapid health diagnostics, medical research, environmental monitoring, and security monitoring. To integrate optical sensing systems that are autonomous, it is essential to integrate the sensor, light source, and light detection into a single substrate or chip. The integration of this optical system with signal control and processing electronics enable discrimination with individually customized sensors in sensor arrays, and high sensitivity levels. Thin film optoelectronic active device integration with planar optical passive devices is a heterogeneous integration method for fabricating planar lightwave integrated circuits at the chip level and planar lightwave integrated systems at the substrate and package level.

Citation Download Citation

Nan Marie Jokerst, Martin A. Brooke, Sang-Yeon Cho, Mikkel Thomas, Jeffrey Lillie, Daeik Kim, Stephen Ralph, Karla Dennis, Benita Comeau, and Cliff Henderson "Integrated planar lightwave bio/chem OEIC sensors on Si CMOS circuits", Proc. SPIE 5730, Optoelectronic Integration on Silicon II, (7 March 2005); https://doi.org/10.1117/12.592771

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