A novel phase measurement profilometry based on linear CCD array

Hong Zhao; Zhihua Zhao; Kejian Jiang; Yuanhe Song

doi:10.1117/12.621463

12 April 2005 A novel phase measurement profilometry based on linear CCD array

Hong Zhao, Zhihua Zhao, Kejian Jiang, Yuanhe Song

Proceedings Volume 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics; (2005) https://doi.org/10.1117/12.621463
Event: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2004, -, Singapore

Abstract

A new fast 3D profilometry is presented in this paper. Although the phase measuring method can reach more high precision , its real measurement speed is very low and can't be applied on production lines because of its phase-shift operations. Three lines CCD arrays, 1024 pixels each, are mounted together with the same distance intervals. Needless to perform phase shift operations, the CCD can consecutively scan and grab 3 phase distributed pictures which will be separately calculated by 3 DSP processors. Thus the whole measurement process is finished. The experimental results show that the phase measurement system by using three-line CCD has high application values for its high precision and speed.

Citation Download Citation

Hong Zhao, Zhihua Zhao, Kejian Jiang, and Yuanhe Song "A novel phase measurement profilometry based on linear CCD array", Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); https://doi.org/10.1117/12.621463

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KEYWORDS

Charge-coupled devices

Digital signal processing

Phase shifts

Phase measurement

3D metrology

Image processing

Signal processing

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