The laser-scanning confocal vibrometer microscope

Christian Rembe; Alexander Drabenstedt

doi:10.1117/12.611996

13 June 2005 The laser-scanning confocal vibrometer microscope

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.611996
Event: Optical Metrology, 2005, Munich, Germany

Abstract

Sub-micrometer lateral resolution for the optical vibration measurement can be achieved when the scanned laser beam of a confocal microscope is the measurement beam of a heterodyne laser-Doppler vibrometer. Such a scanning system that allows vibration measurements up to 30 MHz is presented in this paper for the first time. We measured a minimum 1/e² -power spot diameter of 745 nm and, therefore, the vibration analysis of sub-micrometer mechanical structures is possible with our system. We demonstrate measurements on comb-drive fingers with 2 μm diameter, the tiniest structures available for us.

Citation Download Citation

Christian Rembe and Alexander Drabenstedt "The laser-scanning confocal vibrometer microscope", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.611996

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