Compact and debris-free laser plasma soft x-ray source based on a gas puff target

H. Fiedorowicz; A. Bartnik; R. Jarocki; J. Kostecki; J. Krzywinski; R. Rakowski; M. Szczurek

doi:10.1117/12.615872

31 August 2005 Compact and debris-free laser plasma soft x-ray source based on a gas puff target

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, R. Rakowski, M. Szczurek

Proceedings Volume 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II; 59180G (2005) https://doi.org/10.1117/12.615872
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

In the paper a newly developed compact and debris-free laser plasma soft X-ray source is presented. The source is based on the double-stream gas puff target approach. The targets are formed by pulsed injection of high-Z gas (xenon, krypton or argon) into a hollow stream of low-Z gas (helium or hydrogen) using the valve system composed of two electromagnetic valves and equipped with the double-nozzle setup. The outer stream of gas confines the inner stream improving the gas puff target characteristics (higher density of high-Z gas at longer distance from the nozzle output). It causes efficient absorption of laser energy in a plasma and strong soft X-ray production. Additionally, the use of the double-stream gas puff target approach makes possible to avoid degradation of the nozzle by the laser plasma. Spectral characteristics of soft X-ray emission from the source are presented. Applications in X-ray pulsed radiography, microprocessing of polymers by direct soft X-ray photo-etching, and EUV technologies are discussed.

Citation Download Citation

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, R. Rakowski, and M. Szczurek "Compact and debris-free laser plasma soft x-ray source based on a gas puff target", Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 59180G (31 August 2005); https://doi.org/10.1117/12.615872

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