Potentialities of optical profilometer MicroProf FRT for surface quality measurement

Kateřina Páleníkova; Miloslav Ohlídal

doi:10.1117/12.638927

6 December 2006 Potentialities of optical profilometer MicroProf FRT for surface quality measurement

Kateřina Páleníkova, Miloslav Ohlídal

Proceedings Volume 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 594510 (2006) https://doi.org/10.1117/12.638927
Event: 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2005, Nitra, Slovakia

Abstract

Principle, parameters and selected applications of the optical profilometer MicroProf FRT (Fries Research & Technology GmbH) in determining surface quality are presented in this contribution.

Citation Download Citation

Kateřina Páleníkova and Miloslav Ohlídal "Potentialities of optical profilometer MicroProf FRT for surface quality measurement", Proc. SPIE 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 594510 (6 December 2006); https://doi.org/10.1117/12.638927

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