Design and Fabrication of Low-microwave loss Coplannar Waveguide and precise V groove on Silicon Substrate for Optoelectronic Packaging

Hua Yang; Hongliang Zhu; Hongyun Xie; Lingjuan Zhao; Fan Zhou; Wei Wang

doi:10.1117/12.635519

3 December 2005 Design and fabrication of low-microwave loss coplannar waveguide and precise V groove on silicon substrate for optoelectronic packaging

Hua Yang, Hongliang Zhu, Hongyun Xie, Lingjuan Zhao, Fan Zhou, Wei Wang

Author Affiliations +

Proceedings Volume 6019, Passive Components and Fiber-based Devices II; 601938 (2005) https://doi.org/10.1117/12.635519
Event: Asia-Pacific Optical Communications, 2005, Shanghai, China

Abstract

Optoelectronic packaging has become a most important factor that influences the final performance and cost of the module. In this paper, low microwave loss coplanar waveguide(CPW) on high resistivity silicon(HRS) and precise V groove in silicon substrate were successfully fabricated. The microwave attenuation of the CPW made on HRS with the simple process is lower than 2 dB/cm in the frequency range of 0~26GHz, and V groove has the accuracy in micro level and smooth surface.These two techniques built a good foundation for high frequency packaging and passive coupling of the optoelectronic devices. Based on these two techniques, a simple high resistivity silicon substrate that integrated V groove and CPW for flip-chip packaging of lasers was completed. It set a good example for more complicate optoelectronic packaging.

Citation Download Citation

Hua Yang, Hongliang Zhu, Hongyun Xie, Lingjuan Zhao, Fan Zhou, and Wei Wang "Design and fabrication of low-microwave loss coplannar waveguide and precise V groove on silicon substrate for optoelectronic packaging", Proc. SPIE 6019, Passive Components and Fiber-based Devices II, 601938 (3 December 2005); https://doi.org/10.1117/12.635519

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