Improving the sensitivity of biosensor by use of the Ag and SiO<sub>2</sub> films

Ling-Chih Kao; Ming-Hung Chiu; Bo-Yuan Shih; Chih-Hsien Shih; Cheng-Ru Tsai; Fuh-Shyang Juang

doi:10.1117/12.637735

28 December 2005 Improving the sensitivity of biosensor by use of the Ag and SiO₂ films

Ling-Chih Kao, Ming-Hung Chiu, Bo-Yuan Shih, Chih-Hsien Shih, Cheng-Ru Tsai, Fuh-Shyang Juang

Proceedings Volume 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV; 60370W (2005) https://doi.org/10.1117/12.637735
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

For improving the sensitivity of a SPR biosensor, we proposed a new combination of the thin silver (Ag) and SiO₂ films, and used the common-path heterodyne interferometry. Although the Ag film has higher sensitivity than the gold (Au) film¹, but Ag has toxicity for many media and it is easy to be oxidized. In order to enhance the sensitivity and protect the tested medium not to directly contact with Ag, we selected a coating of SiO₂ on the Ag film for the reason of it is cheaper and easy to obtain. The simulations and experimental results are shown that its best resolution could reach to the value of 6.9×10^-9RIU.

Citation Download Citation

Ling-Chih Kao, Ming-Hung Chiu, Bo-Yuan Shih, Chih-Hsien Shih, Cheng-Ru Tsai, and Fuh-Shyang Juang "Improving the sensitivity of biosensor by use of the Ag and SiO₂ films", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60370W (28 December 2005); https://doi.org/10.1117/12.637735

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