Characterisation of nano-crystalline titanium dioxide films grown by atmospheric pressure plasma electrolytic deposition

Thierry Paulmier; John M. Bell; Peter M. Fredericks

doi:10.1117/12.637950

28 December 2005 Characterisation of nano-crystalline titanium dioxide films grown by atmospheric pressure plasma electrolytic deposition

Thierry Paulmier, John M. Bell, Peter M. Fredericks

Author Affiliations +

Proceedings Volume 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV; 60370Y (2005) https://doi.org/10.1117/12.637950
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

A new atmospheric pressure plasma electrolytic process has been developed for the deposition of TiO₂ crystalline thin films on metal substrate. Contrary to the other deposition techniques, the process occurs in a liquid precursor, composed of titanium tetraisopropoxide and absolute ethanol. A plasma discharge is created and confined around the cathode in a superheated vapour sheath surrounded by the liquid phase, inducing the production of a thin TiO₂ coating at the surface of the cathode. Because of the flexibility of the operating parameters, this technology allows the rapid deposition of thin films with a wide range of structural and physical properties. This process enables therefore the production of nanocrystalline titania films with adjustable morphology and structure (anatase, rutile) by adjusting the operating voltage, current intensity, the treatment time and calcination temperature. The analysis of the structure and composition of these TiO₂ coatings have been carried out by Scanning Electron Microscopy, Transmission Electron Microscopy, Raman spectroscopy, X-ray Photoelectron Spectroscopy and X-Ray Diffraction. A thorough study has been performed to understand the influence of the operating parameters on the properties and structure of the coatings.

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Thierry Paulmier, John M. Bell, and Peter M. Fredericks "Characterisation of nano-crystalline titanium dioxide films grown by atmospheric pressure plasma electrolytic deposition", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60370Y (28 December 2005); https://doi.org/10.1117/12.637950

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