500-mm aperture wavelength-tuning phase-shifting interferometer

Liqun Chai; Qiao Xu; Yan Deng; Guiping Cheng; Jiancheng Xu; Qikai Shi

doi:10.1117/12.677976

19 May 2006 500-mm aperture wavelength-tuning phase-shifting interferometer

Liqun Chai, Qiao Xu, Yan Deng, Guiping Cheng, Jiancheng Xu, Qikai Shi

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61500E (2006) https://doi.org/10.1117/12.677976
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

A 500-mm-aperture wavelength-tuning phase-shifting interferometer has been developed in FOERC applied to the measurement of large optics. The optical and mechanical design and the calibration technique of the phase shifter are described in detail. Test results show that Peak-to-Valley value smaller than 63nm of interference cavity is achieved.

Citation Download Citation

Liqun Chai, Qiao Xu, Yan Deng, Guiping Cheng, Jiancheng Xu, and Qikai Shi "500-mm aperture wavelength-tuning phase-shifting interferometer", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500E (19 May 2006); https://doi.org/10.1117/12.677976

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available