Systematic optimization of the thin-film stack by minimizing CD sensitivity

Shinn-Sheng Yu; Burn J. Lin; Anthony Yen; Chih-Ming Ke

doi:10.1117/12.658323

21 March 2006 Systematic optimization of the thin-film stack by minimizing CD sensitivity

Shinn-Sheng Yu, Burn J. Lin, Anthony Yen, Chih-Ming Ke

Proceedings Volume 6154, Optical Microlithography XIX; 615440 (2006) https://doi.org/10.1117/12.658323
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

The very tight critical dimension(CD) specification as well as the very small energy latitude(EL) of the 65-nm node and beyond, planned to be accomplished by ArF lithography, require that the control of the employed thin-film stack should also be very tight. In such cases, there are generally several optical parameters of the thin-film stack that have appreciable effects on CD variation. So, we can not just focus on minimizing the swing effect by minimizing substrate reflectivity, as we did conventionally. Here, we propose a systematic methodology for doing optimization of the thin-film stack when several optical parameters of the thin-film stack come into play simultaneously. By adopting a proper figure of merit, the optimization can be done automatically. The specially designed algorithm ensures that global optimization can be achieved.

Citation Download Citation

Shinn-Sheng Yu, Burn J. Lin, Anthony Yen, and Chih-Ming Ke "Systematic optimization of the thin-film stack by minimizing CD sensitivity", Proc. SPIE 6154, Optical Microlithography XIX, 615440 (21 March 2006); https://doi.org/10.1117/12.658323

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available