Scanning near-field optical microscopy, spectroscopy, and nanolithography

Vladimir F. Dryakhlushin

doi:10.1117/12.675860

18 April 2006 Scanning near-field optical microscopy, spectroscopy, and nanolithography

Vladimir F. Dryakhlushin

Proceedings Volume 6180, Photonics, Devices, and Systems III; 618029 (2006) https://doi.org/10.1117/12.675860
Event: Photonics, Devices, and Systems III, 2005, Prague, Czech Republic

Abstract

The overview of the last investigations in the areas of scanning near-field optical microscopy (SNOM), surface diagnostics and surface modification with nanometre resolution using SNOM are observed. The operation principles of different types of SNOM are examined. The various method of SNOM probes fabrication with high transmission coefficient, in particularly, on the base of tapered single-mode optical fiber are studied. Besides high resolution imaging SNOM areas of application in scientific research are the local optical diagnostics of sample surface and surface modification for superhigh density data recording and nanoelectronics. The different methods of SNOM diagnostics are observed. It are the local optical spectroscopy of semiconductor nano-objects (quantum wells, wires and dots), near-field photoconductivity of heterostructures, the mapping of semiconductor laser radiation in near-field zone, the creation of point source of terahertz radiation and so on. The various methods of pattern fabrication with minimal size ofabout 30 - 50 nanometres using SNOM are investigated.

Citation Download Citation

Vladimir F. Dryakhlushin "Scanning near-field optical microscopy, spectroscopy, and nanolithography", Proc. SPIE 6180, Photonics, Devices, and Systems III, 618029 (18 April 2006); https://doi.org/10.1117/12.675860

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