Determination of the optical constants of amorphous carbon in the EUV spectral region 40-450 eV

Yu. A. Uspenskii; J. F. Seely; B. Kjornrattanawanich; D. L. Windt; Ye. A. Bugayev; V. V. Kondratenko; I. A. Artyukov; A. A. Titov; E. T. Kulatov; A. V. Vinogradov

doi:10.1117/12.683878

15 September 2006 Determination of the optical constants of amorphous carbon in the EUV spectral region 40-450 eV

Yu. A. Uspenskii, J. F. Seely, B. Kjornrattanawanich, D. L. Windt, Ye. A. Bugayev, V. V. Kondratenko, I. A. Artyukov, A. A. Titov, E. T. Kulatov, A. V. Vinogradov

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Proceedings Volume 6317, Advances in X-Ray/EUV Optics, Components, and Applications; 631713 (2006) https://doi.org/10.1117/12.683878
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

The extreme ultraviolet (EUV) optical constants δ(ω) and β(ω) of amorphous carbon were determined on the basis of transmission measurements at hω=18-450 eV, the first-principles calculation of the dielectric tensor at hω<25 eV, and the Kramers-Kronig calculation of δ(ω). Our optical constants generally agree with the CXRO data, excluding the vicinity of the K-edge. First-principles analysis shows that two thresholds of absorption (at 284 eV and 291 eV) found in the present study are caused, respectively, by the π- and σ- bonds. Their weights are controlled by an orientation of graphene sheets in a-carbon.

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Yu. A. Uspenskii, J. F. Seely, B. Kjornrattanawanich, D. L. Windt, Ye. A. Bugayev, V. V. Kondratenko, I. A. Artyukov, A. A. Titov, E. T. Kulatov, and A. V. Vinogradov "Determination of the optical constants of amorphous carbon in the EUV spectral region 40-450 eV", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631713 (15 September 2006); https://doi.org/10.1117/12.683878

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