High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors

Satoshi Matsuyama; Hidekazu Mimura; Mari Shimura; Hirokatsu Yumoto; Keiko Katagishi; Soichiro Handa; Akihiko Shibatani; Yasuhisa Sano; Kazuya Yamamura; Yoshinori Nishino; Kenji Tamasaku; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi

doi:10.1117/12.681964

29 August 2006 High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors

Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Author Affiliations +

Proceedings Volume 6317, Advances in X-Ray/EUV Optics, Components, and Applications; 631719 (2006) https://doi.org/10.1117/12.681964
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

We developed a high-spatial-resolution scanning X-ray fluorescence microscope (SXFM) with Kirkpatrick-Baez mirrors. As a result of focusing tests at 15 keV, the focused beam having a FWHM of 30 x 50 nm² was achieved. Additionally, the size was controllable within the wide range of 30 ~ 1400 nm merely by adjusting the X-ray source size. The observation of a fine test chart suggests that SXFM enables us to visualize the element distribution inside the pattern at a spatial resolution better than 30 nm. We applied the SXFM to observe intracellular elemental distributions at a single-cell level, so that we could acquire element distribution maps with a spatial resolution of sub-100 nm and lower detection limit of 0.01 fg.

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Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi "High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631719 (29 August 2006); https://doi.org/10.1117/12.681964

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