PLZT thick films for multimode optical waveguide prepared by aerosol deposition

Takashi Yamaguchi; Pang-Boey Lim; Kwang-Ho Shin; Hironaga Uchida; Mitsuteru Inoue

doi:10.1117/12.681364

31 August 2006 PLZT thick films for multimode optical waveguide prepared by aerosol deposition

Takashi Yamaguchi, Pang-Boey Lim, Kwang-Ho Shin, Hironaga Uchida, Mitsuteru Inoue

Proceedings Volume 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III; 632717 (2006) https://doi.org/10.1117/12.681364
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

Highly transparent polycrystalline lanthanum-modified lead zirconate titanate (PLZT) thick films were prepared using aerosol deposition method (ADM) of calcined complex powders. Effects of incident angle of aerosol and particle size as well as annealing temperature on optical and electro-optic properties of films were investigated. The film with higher transparency was obtained with smaller particle, because the aggregation frequency of particles in aerosol decreased with reducing the particle size. The transparency of the films increased with decreasing the incident angle of aerosol. This is presumably due to the fact that the optimal incident angle of aerosol results in the reduction of impurity and pore, which makes the film to be denser micro-structurally. The XRD peaks of as-deposed films shifted to lower angle side, indicating that large compressive stress, which was generated by mechanical collision of particles, acted in the films. But the stress was eliminated through annealing process. The birefringence change in annealed film increased exponentially with an applied electrical field to reach 0.0036 at 100kV/cm. To make a multimode waveguide, the PLZT film with 22 μm thick was formed into a silicon groove, which was fabricated through anisotropic wet etching process. The far field profile of multimode optical wave transmitted through the fabricated PLZT waveguide was successfully observed and could be controlled with an applied electrical field.

Citation Download Citation

Takashi Yamaguchi, Pang-Boey Lim, Kwang-Ho Shin, Hironaga Uchida, and Mitsuteru Inoue "PLZT thick films for multimode optical waveguide prepared by aerosol deposition", Proc. SPIE 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III, 632717 (31 August 2006); https://doi.org/10.1117/12.681364

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Aerosols

Waveguides

Atmospheric particles

Particles

Transmittance

Annealing

Holograms

Show All Keywords

Keywords/Phrases

Search In:

Publication Years