The Metrology Of Grazing Incidence Optics At The National Physical Laboratory

A. Franks

doi:10.1117/12.964371

21 October 1986 The Metrology Of Grazing Incidence Optics At The National Physical Laboratory

A. Franks

Proceedings Volume 0640, Grazing Incidence Optics; (1986) https://doi.org/10.1117/12.964371
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States

Abstract

The ultimate test of an optical component is its performance under conditions similar to those that it will encounter in service. Prior to this stage, precision dimensional measurement is the key to achieving the specification, and a range of measuring instruments has been developed specifically for the metrology of grazing incidence optics. These instruments can be calibrated to uncertainties of about 10 picometres by X-ray interferometry.

Citation Download Citation

A. Franks "The Metrology Of Grazing Incidence Optics At The National Physical Laboratory", Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); https://doi.org/10.1117/12.964371

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