Complex MEMS device: microshutter array system for space applications

Mary J. Li; Tomoko Adachi; Christine Allen; Sachi Babu; Sateesh Bajikar; Michael Beamesderfer; Ruth Bradley; Kevin Denis; Nick Costen; Audrey Ewin; Dave Franz; Larry Hess; Ron Hu; Kamili Jackson; Murzy Jhabvala; Dan Kelly; Todd King; Gunther Kletetschka; Alexander Kutyrev; Barney Lynch; Timothy Miller; Harvey Moseley; Vilem Mikula; Brent Mott; Lance Oh; James Pontius; Dave Rapchun; Chris Ray; Knute Ray; Eric Schulte; Scott Schwinger; Peter Shu; Robert Silverberg; Wayne Smith; Steve Snodgrass; David Sohl; Leroy Sparr; Rosalind Steptoe-Jackson; Veronica Valeriano; Liqin Wang; Yun Zheng; Chris Zincke

doi:10.1117/12.721502

3 May 2007 Complex MEMS device: microshutter array system for space applications

Mary J. Li, Tomoko Adachi, Christine Allen, Sachi Babu, Sateesh Bajikar, Michael Beamesderfer, Ruth Bradley, Kevin Denis, Nick Costen, Audrey Ewin, Dave Franz, Larry Hess, Ron Hu, Kamili Jackson, Murzy Jhabvala, Dan Kelly, Todd King, Gunther Kletetschka, Alexander Kutyrev, Barney Lynch, Timothy Miller, Harvey Moseley, Vilem Mikula, Brent Mott, Lance Oh, James Pontius, Dave Rapchun, Chris Ray, Knute Ray, Eric Schulte, Scott Schwinger, Peter Shu, Robert Silverberg, Wayne Smith, Steve Snodgrass, David Sohl, Leroy Sparr, Rosalind Steptoe-Jackson, Veronica Valeriano, Liqin Wang, Yun Zheng, Chris Zincke

Author Affiliations +

Proceedings Volume 6556, Micro (MEMS) and Nanotechnologies for Defense and Security; 655602 (2007) https://doi.org/10.1117/12.721502
Event: Defense and Security Symposium, 2007, Orlando, Florida, United States

Abstract

A complex MEMS device, microshutter array system, is being developed at NASA Goddard Space Flight Center for use as an aperture array for a Near-Infrared Spectrometer (NirSpec). The instrument will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope after Hubble Space Telescope retires. The microshutter arrays (MSAs) are designed for the selective transmission of light with high efficiency and high contrast. Arrays are close-packed silicon nitride membranes with a pixel size close to 100x200 &mgr;m. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are made on to each shutter for light leak prevention so to enhance optical contrast. Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS bulk-micromachining technologies and packaged using single-sided indium flip-chip bonding technology. The MSA flight concept consists of a mosaic of 2 x 2 format of four fully addressable 365 x 171 arrays placed in the JWST optical path at the focal plane.

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Mary J. Li, Tomoko Adachi, Christine Allen, Sachi Babu, Sateesh Bajikar, Michael Beamesderfer, Ruth Bradley, Kevin Denis, Nick Costen, Audrey Ewin, Dave Franz, Larry Hess, Ron Hu, Kamili Jackson, Murzy Jhabvala, Dan Kelly, Todd King, Gunther Kletetschka, Alexander Kutyrev, Barney Lynch, Timothy Miller, Harvey Moseley, Vilem Mikula, Brent Mott, Lance Oh, James Pontius, Dave Rapchun, Chris Ray, Knute Ray, Eric Schulte, Scott Schwinger, Peter Shu, Robert Silverberg, Wayne Smith, Steve Snodgrass, David Sohl, Leroy Sparr, Rosalind Steptoe-Jackson, Veronica Valeriano, Liqin Wang, Yun Zheng, and Chris Zincke "Complex MEMS device: microshutter array system for space applications", Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 655602 (3 May 2007); https://doi.org/10.1117/12.721502

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