Optical correlation measurement of surface roughness

Oleg V. Angelsky; Alexander P. Maksimyak; Peter P. Maksimyak

doi:10.1117/12.725978

18 June 2007 Optical correlation measurement of surface roughness

Oleg V. Angelsky, Alexander P. Maksimyak, Peter P. Maksimyak

Author Affiliations +

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66162G (2007) https://doi.org/10.1117/12.725978
Event: Optical Metrology, 2007, Munich, Germany

Abstract

The feasibilities for optical correlation diagnostics of a rough surface with large surface inhjmogeneities by determining the transformations of the longitudinal coherence function of the field scattered by such surface are substantiated and implemented.

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Oleg V. Angelsky, Alexander P. Maksimyak, and Peter P. Maksimyak "Optical correlation measurement of surface roughness", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66162G (18 June 2007); https://doi.org/10.1117/12.725978

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