Capabilities and limitations of paraxial operator approach for modeling of nano-scale feature evaluation

Alexander Normatov; Boris Spektor; Joseph Shamir

doi:10.1117/12.728543

18 June 2007 Capabilities and limitations of paraxial operator approach for modeling of nano-scale feature evaluation

Alexander Normatov, Boris Spektor, Joseph Shamir

Proceedings Volume 6617, Modeling Aspects in Optical Metrology; 661704 (2007) https://doi.org/10.1117/12.728543
Event: Optical Metrology, 2007, Munich, Germany

Abstract

The interaction of light with nano-scale features is usually associated with rigorous vector modeling or other computation intensive method. It turns out, however, that several interesting cases can be analyzed by a model based on scalar, paraxial operators. Good correspondence was found between this theoretical model and experimental investigation. In our work, the capabilities of scalar, paraxial operator approach are discussed for the cases of Dark beam and Gaussian beam scanning microscopes. Fundamental limitations of the approach are outlined as well. The sensitivity of the Dark beam scanning microscope was compared for the real experimental procedure and the idealized theoretical model which indicated a potential of 1nm sensitivity.

Citation Download Citation

Alexander Normatov, Boris Spektor, and Joseph Shamir "Capabilities and limitations of paraxial operator approach for modeling of nano-scale feature evaluation", Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 661704 (18 June 2007); https://doi.org/10.1117/12.728543

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available