Study And Application Of Laser Created X-Ray Sources

H. Pepin; P Alaterre; M Chaker; P Lavigne; F Martin; R Fabbro; B Faral; D Nagel; M Peckerar

doi:10.1117/12.938700

21 October 1986 Study And Application Of Laser Created X-Ray Sources

H. Pepin, P Alaterre, M Chaker, P Lavigne, F Martin, R Fabbro, B Faral, D Nagel, M Peckerar

Author Affiliations +

Proceedings Volume 0664, High Intensity Laser Processes; (1986) https://doi.org/10.1117/12.938700
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

Laser produced X-ray spectra are studied both theoretically and experimentally in the range 0.1-5 keV for laser wavelengths λ = 0.26 μm and λ = 0.53 μm. The X-ray conversion efficiencies in various spectral ranges are presented. It is possible to obtain from a laser plasma source a well characterized X-ray spectra. As an example of application, the exposure of P.B.S. resist is studied both in the XUV and soft X-ray ranges.

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H. Pepin, P Alaterre, M Chaker, P Lavigne, F Martin, R Fabbro, B Faral, D Nagel, and M Peckerar "Study And Application Of Laser Created X-Ray Sources", Proc. SPIE 0664, High Intensity Laser Processes, (21 October 1986); https://doi.org/10.1117/12.938700

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