Silicon test object of the linewidth of the nanometer range for SEM and AFM

Yu. A. Novikov; V. P. Gavrilenko; Yu. V. Ozerin; A. V. Rakov; P. A. Todua

doi:10.1117/12.733134

10 September 2007 Silicon test object of the linewidth of the nanometer range for SEM and AFM

Yu. A. Novikov, V. P. Gavrilenko, Yu. V. Ozerin, A. V. Rakov, P. A. Todua

Proceedings Volume 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing; 66480R (2007) https://doi.org/10.1117/12.733134
Event: NanoScience + Engineering, 2007, San Diego, California, United States

Abstract

The results of the study of a test object on scanning electron microscopes and atomic force microscopes are presented. The test object presents a relief on a monosilicon surface, and it is fabricated by the anisotropic etching of monosilicon. The relief elements have a trapezoidal profile with large angles of inclination of the sidewalls. The sides of the relief elements coincide with the crystallographic planes {100} and {111} of silicon. The test object is intended for calibration of scanning electron microscopes and atomic force microscopes.

Citation Download Citation

Yu. A. Novikov, V. P. Gavrilenko, Yu. V. Ozerin, A. V. Rakov, and P. A. Todua "Silicon test object of the linewidth of the nanometer range for SEM and AFM", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480R (10 September 2007); https://doi.org/10.1117/12.733134

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available