Advances in short-wavelength x-ray multilayer optics: toward high-throughput multimirror systems for the wavelengths <10 nm

Igor A. Artyukov; Yegor A. Bugayev; Oleksandr Yu. Devizenko; Ruslan M. Feshchenko; Tadashi Hatano; Yuri S. Kasyanov; Valeri V. Kondratenko; Yuri A. Uspenski; Alexander V. Vinogradov

doi:10.1117/12.734601

12 October 2007 Advances in short-wavelength x-ray multilayer optics: toward high-throughput multimirror systems for the wavelengths <10 nm

Igor A. Artyukov, Yegor A. Bugayev, Oleksandr Yu. Devizenko, Ruslan M. Feshchenko, Tadashi Hatano, Yuri S. Kasyanov, Valeri V. Kondratenko, Yuri A. Uspenski, Alexander V. Vinogradov

Author Affiliations +

Proceedings Volume 6702, Soft X-Ray Lasers and Applications VII; 67020V (2007) https://doi.org/10.1117/12.734601
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

This paper presents novel approaches and techniques in development and application of multi-mirror X-ray optical systems operating in the spectral region of "carbon window" (λ ~ 4.5 nm). Two approaches for fabrication of the graded Co/C multilayer mirrors for Schwarzschild objective are presented. A pair of the spherical mirrors with Co/C multilayer coatings was tested in combination with scandium/carbon filters and laser produced plasma X-ray source for stereoimaging of low density materials at λ ~ 4.5 nm.

Citation Download Citation

Igor A. Artyukov, Yegor A. Bugayev, Oleksandr Yu. Devizenko, Ruslan M. Feshchenko, Tadashi Hatano, Yuri S. Kasyanov, Valeri V. Kondratenko, Yuri A. Uspenski, and Alexander V. Vinogradov "Advances in short-wavelength x-ray multilayer optics: toward high-throughput multimirror systems for the wavelengths <10 nm", Proc. SPIE 6702, Soft X-Ray Lasers and Applications VII, 67020V (12 October 2007); https://doi.org/10.1117/12.734601

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available