Laser annealing of ferroelectric thin films

I. G. Lebo; S. I. Kudryashov; K. A. Vorotilov; A. S. Sigov; O. M. Zhigalina; O. A. Zhitkova; V. D. Zvorykin

doi:10.1117/12.751914

2 July 2007 Laser annealing of ferroelectric thin films

I. G. Lebo, S. I. Kudryashov, K. A. Vorotilov, A. S. Sigov, O. M. Zhigalina, O. A. Zhitkova, V. D. Zvorykin

Proceedings Volume 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies; 67320Q (2007) https://doi.org/10.1117/12.751914
Event: International Conference on Lasers, Applications, and Technologies '07, 2007, Minsk, Belarus

Abstract

experimental and numerical investigations of laser annealing of thin ferroelectric heterostructures have been presented in this paper. Laser annealing of thin films has been made in KrF laser facilities (Lebedev Phys. Institute, Moscow). 2D numerical code "TEPOL" have been developed for modeling of physical processes in multilayer samples. X-ray structural analysis and e-beam microscopy have been used to research the samples. The laser heating leads to partial crystallization of film and considerable change metal system in compare with traditional heat treating. A new approach to the study of samples with help of photo-acoustic method has been discussed in the paper.

Citation Download Citation

I. G. Lebo, S. I. Kudryashov, K. A. Vorotilov, A. S. Sigov, O. M. Zhigalina, O. A. Zhitkova, and V. D. Zvorykin "Laser annealing of ferroelectric thin films", Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 67320Q (2 July 2007); https://doi.org/10.1117/12.751914

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