Thin film synthesis of wurtzite boron nitride by femtosecond pulsed laser deposition

Tasuku Shimizu; Takahiro Nakamura; Shunichi Sato

doi:10.1117/12.755970

1 August 2007 Thin film synthesis of wurtzite boron nitride by femtosecond pulsed laser deposition

Tasuku Shimizu, Takahiro Nakamura, Shunichi Sato

Proceedings Volume 6785, ROMOPTO 2006: Eighth Conference on Optics; 67850E (2007) https://doi.org/10.1117/12.755970
Event: ROMOPTO 2006: Eighth Conference on Optics, 2006, Sibiu, Romania

Abstract

Thin films of boron nitride were grown by femtosecond, pulsed laser deposition. The films were analyzed by transmission electron microscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. All the results indicated the presence of wurtzite phase in the thin film in contrast to usual phases such as cubic or hexagonal ones. Moreover, the electron diffraction pattern showed that the size of the wurtzite boron nitride crystallite was larger than 4 μm although boron nitride films reported so far consisted of small crystallites in the nanometer region.

Citation Download Citation

Tasuku Shimizu, Takahiro Nakamura, and Shunichi Sato "Thin film synthesis of wurtzite boron nitride by femtosecond pulsed laser deposition", Proc. SPIE 6785, ROMOPTO 2006: Eighth Conference on Optics, 67850E (1 August 2007); https://doi.org/10.1117/12.755970

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