Fabrication and characterization of an SOI-based thermally tuned phase modulator

Asuquo B. Eniang; Bassey E. Obiesio; Kufre Akpan; Christopher Raum

doi:10.1117/12.779380

8 November 2007 Fabrication and characterization of an SOI-based thermally tuned phase modulator

Asuquo B. Eniang, Bassey E. Obiesio, Kufre Akpan, Christopher Raum

Proceedings Volume 6796, Photonics North 2007; 679632 (2007) https://doi.org/10.1117/12.779380
Event: Photonics North 2007, 2007, Ottawa, Canada

Abstract

The key process steps in the fabrication of a thermally-tuned silicon-on-insulator (SOI) based phase modulator are detailed. By altering the waveguide temperature, the thermo-optic effect is used to vary the modulator's output. Additionally, various experimental approaches are used to determine the operating characteristics of the resulting device. This includes a swept wave system (SWS) suitable for testing the performance of the phase modulator. Analyses will yield such measurements as insertion loss, polarization dependent loss (PDL), peak wavelength, and ripple period.

Citation Download Citation

Asuquo B. Eniang, Bassey E. Obiesio, Kufre Akpan, and Christopher Raum "Fabrication and characterization of an SOI-based thermally tuned phase modulator", Proc. SPIE 6796, Photonics North 2007, 679632 (8 November 2007); https://doi.org/10.1117/12.779380

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