Integrated Langmuir Devices: Structural And Microprocessing Methods

Scott E Rickert; Jerome B Lando

doi:10.1117/12.939646

28 January 1987 Integrated Langmuir Devices: Structural And Microprocessing Methods

Scott E Rickert, Jerome B Lando

Proceedings Volume 0682, Molecular and Polymeric Optoelectronic Materials; (1987) https://doi.org/10.1117/12.939646
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Integrated Langmuir Devices ("ILD's") are hybrid microelectronic and microptic devices developed at the Polymer Microdevice Laboratory ("PML") at Case Western Reserve University. These devices are part organic/polymeric and part inorganic, utilizing the more desirable features of each to create multifunctional devices. Langmuir films prepared by the Lang-muir-Blodgett technique have been successfully integrated into the conventional batch processing methodologies of usual semiconductors. ILD's processing techniques and several products from this process technology are described.

Citation Download Citation

Scott E Rickert and Jerome B Lando "Integrated Langmuir Devices: Structural And Microprocessing Methods", Proc. SPIE 0682, Molecular and Polymeric Optoelectronic Materials, (28 January 1987); https://doi.org/10.1117/12.939646

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