Phase-shifting laser diode Sagnac interferometer for surface profile measurement

Takamasa Suzuki; Masato Shirai; Osami Sasaki

doi:10.1117/12.756447

26 November 2007 Phase-shifting laser diode Sagnac interferometer for surface profile measurement

Takamasa Suzuki, Masato Shirai, Osami Sasaki

Proceedings Volume 6829, Advanced Materials and Devices for Sensing and Imaging III; 68290A (2007) https://doi.org/10.1117/12.756447
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

A phase-shifting Sagnac interferometer that uses wavelength tunability of the laser diode is proposed. A Sagnac interferometer itself is robust for the mechanical disturbances because it has a common path configuration and requires no special reference. Unbalanced optical path introduced between p- and s-polarized beams enables us to implement easy phase-shift by the direct current modulation. Several experimental results indicate that the proposed system is useful for the disturbance-free precise measurement.

Citation Download Citation

Takamasa Suzuki, Masato Shirai, and Osami Sasaki "Phase-shifting laser diode Sagnac interferometer for surface profile measurement", Proc. SPIE 6829, Advanced Materials and Devices for Sensing and Imaging III, 68290A (26 November 2007); https://doi.org/10.1117/12.756447

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