Research and fabrication of harmonic oscillator with high quality in Si-based MOEMS acceleration seismic geophone

Zhengrong Tong; Zhiyong Wang; De En; Caihe Chen; Xuejiao Li; Xiaofang Xie

doi:10.1117/12.755811

4 January 2008 Research and fabrication of harmonic oscillator with high quality in Si-based MOEMS acceleration seismic geophone

Zhengrong Tong, Zhiyong Wang, De En, Caihe Chen, Xuejiao Li, Xiaofang Xie

Author Affiliations +

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 68360M (2008) https://doi.org/10.1117/12.755811
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

A kind of photo-electronic integrated acceleration seismic detecting technology, which is novel and precise based on waveguide M-Z interference, is presented. It provieds modern geologic prospect with a novel detection technology. The principle of the photo-electronic integrated acceleration seismic geophone is introduced in this paper. The core of the photo-electronic integrated acceleration is the silicon harmonic oscillator, which is supported by four silicon beams and integrated on the signal beam of the M-Z interferometer. When the seismic mass is subjected to a normal acceleration a_z, the acceleration a_z, will result in an inertial force F_z, causing the mass to move up or down like the piston, until the counter force of the beam suspension equals this inertial force. The principle of the harmonic oscillator is briefly introduced, the factors influencing the anisotropic etching quality of the harmonic oscillator are analyzed in detail. In experiment, the fabrication technology was studied and improved. The high quality harmonic oscillator has been successfully fabricated. It has been applied in the integrated optical chip of "the theory and experiment research of photoelectric integrated acceleration seismic geophone technology".

Citation Download Citation

Zhengrong Tong, Zhiyong Wang, De En, Caihe Chen, Xuejiao Li, and Xiaofang Xie "Research and fabrication of harmonic oscillator with high quality in Si-based MOEMS acceleration seismic geophone", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360M (4 January 2008); https://doi.org/10.1117/12.755811

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