Laser microfabrication in industry - perspectives from the past, present and future

Malcolm Gower

doi:10.1117/12.774095

20 February 2008 Laser microfabrication in industry - perspectives from the past, present and future

Malcolm Gower

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 687902 (2008) https://doi.org/10.1117/12.774095
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser microfabrication as a technology that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper reviews the historical developments of laser microfabrication, highlights some of its current important industrial applications and takes a forward look at possible developments of the technology.

Citation Download Citation

Malcolm Gower "Laser microfabrication in industry - perspectives from the past, present and future", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 687902 (20 February 2008); https://doi.org/10.1117/12.774095

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