Anisotropic transformation of the beam quality of DPSS lasers for shaping of a narrow line focus for laser crystallization of Si

Mikhail Ivanenko; Alexei Mikhailov; Yuri Miklyaev; Wyacheslaw Grimm; Klaus Bagschik; Andreas Hildebrandt; Vitalij Lissotschenko

doi:10.1117/12.762091

14 February 2008 Anisotropic transformation of the beam quality of DPSS lasers for shaping of a narrow line focus for laser crystallization of Si

Mikhail Ivanenko, Alexei Mikhailov, Yuri Miklyaev, Wyacheslaw Grimm, Klaus Bagschik, Andreas Hildebrandt, Vitalij Lissotschenko

Author Affiliations +

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 68790P (2008) https://doi.org/10.1117/12.762091
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

Advanced laser crystallization of Si for flat panel displays demands a narrow line-shaped light focus with an ultimately high homogeneity. Key element of LIMO line shaping system is an anisotropic quality transformation of a multimode laser beam, which permits a very good homogenization for the long axis and tight focusing with a large depth of focus for the perpendicular high-quality axis. A prototype system has been built with a 90-W 532-nm DPSS laser. It provides a 59-mm long and down to 8 μm (FWHM) narrow focus with a residual inhomogeneity of only 1% (rms). The focus width is adjustable and its shape can be tuned from a quasi-Gauss to a top-hat intensity distribution. The depth of focus at 90% of the peak intensity DOF_0.9I varies from 120 μm for a line width of 8 μm to 275 μm for FWHM = 14 μm. The design of longer lines is in progress at LIMO.

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Mikhail Ivanenko, Alexei Mikhailov, Yuri Miklyaev, Wyacheslaw Grimm, Klaus Bagschik, Andreas Hildebrandt, and Vitalij Lissotschenko "Anisotropic transformation of the beam quality of DPSS lasers for shaping of a narrow line focus for laser crystallization of Si", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790P (14 February 2008); https://doi.org/10.1117/12.762091

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