Closed-loop AO demonstration of MEMS SLM with piston, tip and tilt control

Harold Dyson; Flavio Pardo; Roland Ryf; Vladimir Aksyuk; Robert Frahm; Arman Gasparyan; Rick Papazian; David Ramsey; Maria Elina Simon; Susanne Arney

doi:10.1117/12.770432

8 February 2008 Closed-loop AO demonstration of MEMS SLM with piston, tip, and tilt control

Harold Dyson, Flavio Pardo, Roland Ryf, Vladimir Aksyuk, Robert Frahm, Arman Gasparyan, Rick Papazian, David Ramsey, Maria Elina Simon, Susanne Arney

Author Affiliations +

Proceedings Volume 6888, MEMS Adaptive Optics II; 68880T (2008) https://doi.org/10.1117/12.770432
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

A MEMS SLM with an array of 64×64 pixels, each 120 μm ×120 μm in size, with 98% fill-factor, has been developed. Each reflector in the array is capable of 5 μm of stroke, and ±4° tip and tilt. From a prototype array, 14 contiguous pixels have been independently wired-out to off-chip drive electronics. These 14 pixels have been demonstrated to be effective in an off-the-shelf AO system (with requisite modifications to suit the SLM). For a low-order static aberration, the measured Strehl ratio has been improved from 0.069 to 0.861, a factor of 12 improvement.

Citation Download Citation

Harold Dyson, Flavio Pardo, Roland Ryf, Vladimir Aksyuk, Robert Frahm, Arman Gasparyan, Rick Papazian, David Ramsey, Maria Elina Simon, and Susanne Arney "Closed-loop AO demonstration of MEMS SLM with piston, tip, and tilt control", Proc. SPIE 6888, MEMS Adaptive Optics II, 68880T (8 February 2008); https://doi.org/10.1117/12.770432

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