Design of integrated LOCOS waveguide photodetector on SOI

D. Logan; A. P. Knights; P. E. Jessop; N. G. Tarr

doi:10.1117/12.790960

13 February 2008 Design of integrated LOCOS waveguide photodetector on SOI

D. Logan, A. P. Knights, P. E. Jessop, N. G. Tarr

Proceedings Volume 6898, Silicon Photonics III; 68981J (2008) https://doi.org/10.1117/12.790960
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

It is now established that defects introduced via ion implantation may act as generating centers in silicon waveguide structures and consequently enhance photosensitivity at wavelengths in the region of 1550 nm. Although several integrated p-i-n waveguide photodiode structures have been presented which exploit this behavior, no attempt has been made to model the generation process and thus optimize device design. We report a model that has been implemented using SILVACO's ATLAS software, and reproduces the observed behavior in the aforementioned device structures. By varying parameters such as the dimensions of the device and the implantation conditions, the responsivity can be maximized. In particular, we have designed an integrated structure centered on a 3 µm wide waveguide created by the LOCOS (Local Oxidation of Silicon) technique on lightly p-doped Silicon-on-Insulator. A self aligned n+ polysilicon contact is placed above the ridge, causing the majority of the depletion to overlap with the optical mode. Symmetric p+ regions are placed on either side of the waveguide, separated by a distance selected to optimize responsivity without causing excess loss. This presents a vast improvement over previous structures of its size, having a predicted responsivity in excess of 50 mA/W at a 2V reverse bias.

Citation Download Citation

D. Logan, A. P. Knights, P. E. Jessop, and N. G. Tarr "Design of integrated LOCOS waveguide photodetector on SOI", Proc. SPIE 6898, Silicon Photonics III, 68981J (13 February 2008); https://doi.org/10.1117/12.790960

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KEYWORDS

Waveguides

Silicon

Instrument modeling

Photodetectors

Capacitance

Ion implantation

Absorption

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