Analysis of the uniqueness of an inverse grating characterization method

Bastian Trauter; Jochen Hetzler; Karl-Heinz Brenner

doi:10.1117/12.793688

29 August 2008 Analysis of the uniqueness of an inverse grating characterization method

Bastian Trauter, Jochen Hetzler, Karl-Heinz Brenner

Proceedings Volume 7065, Reflection, Scattering, and Diffraction from Surfaces; 70650T (2008) https://doi.org/10.1117/12.793688
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

We propose a method for the characterization of one- and two-dimensional diffraction gratings by means of the measurement of diffraction efficiencies. The method is based on the comparison of measured and calculated efficiencies. For the numerical calculation we use the Rigorous Coupled Wave Analysis RCWA and an optimization algorithm to determine the grating shape that fits best to the measured data. We analyzed in which cases the method is able to determine the grating shape without ambiguity and which measurement parameters should be used. By systematically analyzing a given inverse problem, we try to derive the theoretical limits of the method.

Citation Download Citation

Bastian Trauter, Jochen Hetzler, and Karl-Heinz Brenner "Analysis of the uniqueness of an inverse grating characterization method", Proc. SPIE 7065, Reflection, Scattering, and Diffraction from Surfaces, 70650T (29 August 2008); https://doi.org/10.1117/12.793688

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available