CdTe x-ray image sensor driven by field emitter array

Toru Aoki; Takuya Sakata; Yuichiro Hanawa; Masashi Nakagawa; Hisashi Morii; Akifumi Koike; Yoichiro Neo; Hidenori Mimura

doi:10.1117/12.795654

4 September 2008 CdTe x-ray image sensor driven by field emitter array

Toru Aoki, Takuya Sakata, Yuichiro Hanawa, Masashi Nakagawa, Hisashi Morii, Akifumi Koike, Yoichiro Neo, Hidenori Mimura

Author Affiliations +

Proceedings Volume 7079, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics X; 707912 (2008) https://doi.org/10.1117/12.795654
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

A novel CdTe X-ray image sensor, which was driven by the FEA, was proposed in order to obtain high spatial resolution X-ray images and have demonstrated the principle operation by using the CdTe image sensor with one pixel. We have also fabricated a FEA matrix with 12x12 pixels to obtain X-ray images. For the further improvement of spatial resolution in the CdTe image sensor, we have proposed a novel double-gated FEA with a focusing lens, which was fabricated by using the etch-back method. The double-gated FEA showed a good focusing characteristic without significant decrease of the emission current, when the height of the focus electrode was optimized. The CdTe image sensor driven by the double-gated FEA is promising for an ultra-high-resolution X-ray image sensor.

Citation Download Citation

Toru Aoki, Takuya Sakata, Yuichiro Hanawa, Masashi Nakagawa, Hisashi Morii, Akifumi Koike, Yoichiro Neo, and Hidenori Mimura "CdTe x-ray image sensor driven by field emitter array", Proc. SPIE 7079, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics X, 707912 (4 September 2008); https://doi.org/10.1117/12.795654

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