Characteristics Of E-Beam Pumped Krf Laser System

K . Ueda; H. Nishioka; H. Takuma

doi:10.1117/12.937290

11 March 1987 Characteristics Of E-Beam Pumped Krf Laser System

K . Ueda, H. Nishioka, H. Takuma

Proceedings Volume 0710, Excimer Lasers and Optics; (1987) https://doi.org/10.1117/12.937290
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States

Abstract

The charcteristics of strongly saturated amplifier with a 100ns electron beam excitation are studied to determine the small signal gain, non-saturable absorption, and saturation intensity from 6% Kr to 95% Kr in Ar diluent. The pumping rates are maintained constant by adjusting the total pressure of gas mixtures to conpensate the different stopping power of Ar and Kr. Non-saturable absorption coefficients are measured at a full saturated amplifier between the zero gain intensity to 80MW/cm2. The small signal gain of 12.9%/cm and non-saturable absorption coefficient of 1.32%/cm2 are obtained for 95% Kr mixture. The saturation intensity, 2.2MW/cm2 for 6% Kr and 2.9MW/cm2 for 95% Kr mixture, derived from the zero gain intensity is in good agreement with the prediction of our computer model. Highest intrinsic efficiency of 12.2% is measured at high Kr concentration where the Extraction power density of 6.8MW/cm2 is obtained by the probe laser beam between 5-6MW/cm2. The formation efficiency for a wide range of Kr concentrations agrees with the theoretical prediction excellently as a function of Kr concentration. The details of the important parameters, gain , absorption, saturation intensity, maximum output, intrinsic efficiency, extraction efficiency, and formation efficiency will be discussed in this paper.

Citation Download Citation

K . Ueda, H. Nishioka, and H. Takuma "Characteristics Of E-Beam Pumped Krf Laser System", Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); https://doi.org/10.1117/12.937290

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available