Silicon slot waveguides for nonlinear optics

A. Säynätjoki; L. Karvonen; A. Khanna; T. Alasaarela; A. Tervonen; S. Honkanen

doi:10.1117/12.812974

6 February 2009 Silicon slot waveguides for nonlinear optics

A. Säynätjoki, L. Karvonen, A. Khanna, T. Alasaarela, A. Tervonen, S. Honkanen

Proceedings Volume 7212, Optical Components and Materials VI; 72120T (2009) https://doi.org/10.1117/12.812974
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

Slot waveguides are designed for silicon-based nonlinear optics. The critical processes in manufacturing such waveguides are lithography, etching and slot filling. Their effects on the properties of the waveguides are studied.

Citation Download Citation

A. Säynätjoki, L. Karvonen, A. Khanna, T. Alasaarela, A. Tervonen, and S. Honkanen "Silicon slot waveguides for nonlinear optics", Proc. SPIE 7212, Optical Components and Materials VI, 72120T (6 February 2009); https://doi.org/10.1117/12.812974

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