Nanotechnology and high-precision optical displacement sensor design for optomechatronical systems

Ali Rostami; R. Yadipour; K. Abbasian; Z. D. Koozehkanani; A. Ghanbari; F. Janabi-Sharifi

doi:10.1117/12.804406

17 November 2008 Nanotechnology and high-precision optical displacement sensor design for optomechatronical systems

Ali Rostami, R. Yadipour, K. Abbasian, Z. D. Koozehkanani, A. Ghanbari, F. Janabi-Sharifi

Author Affiliations +

Proceedings Volume 7266, Optomechatronic Technologies 2008; 72660L (2008) https://doi.org/10.1117/12.804406
Event: International Symposium on Optomechatronic Technologies, 2008, San Diego, California, United States

Abstract

In this paper, design of an ultra high-resolution, compact and tunable optical displacement sensor for optomechatronical systems is presented. In this proposal nanophotonic principles are used to develop displacement sensor which is required strongly in micro and nano machines especially micro robotics. For this purpose, in this work nanocrystal doped micro ring resonator is used as the basic cell. Then we propose integrated case for array applications such as array of micro mirrors. We show that the proposed sensor can easily detect well below nanometer to near picometer ranges. Also, it is illustrated that using Electromagnetically Induced Transparency (EIT) resolution of the proposed sensor can be increased.

Citation Download Citation

Ali Rostami, R. Yadipour, K. Abbasian, Z. D. Koozehkanani, A. Ghanbari, and F. Janabi-Sharifi "Nanotechnology and high-precision optical displacement sensor design for optomechatronical systems", Proc. SPIE 7266, Optomechatronic Technologies 2008, 72660L (17 November 2008); https://doi.org/10.1117/12.804406

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