Micro assembled Fourier transform spectrometer

Yan-mei Kong; Jing-qiu Liang; Zhong-zhu Liang; Bo Wang; Jun Zhang

doi:10.1117/12.828282

20 May 2009 Micro assembled Fourier transform spectrometer

Yan-mei Kong, Jing-qiu Liang, Zhong-zhu Liang, Bo Wang, Jun Zhang

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 728304 (2009) https://doi.org/10.1117/12.828282
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

With the trend of minimization of Fourier transform spectrometer (FTS) which is particularly pronounced in many applications, a model of a micro FTS with no moving parts is proposed and analyzed. During analyzng, the gradients which mainly introduce phase error are accounted. Based on these assumptions and the improved Mertz phase correcting method, the spectrum of signal is simulated with real extended light source. The resolution can be up to 3.43nm@800nm, with high signal-to-noise ratio (SNR) limiting resolving ability 6.8dB. In addition, the fabrication method of components are illuminated and demonstrated, which can not only make it bear some advantages over conventional micro dispersive spectrometers, but also afford some new concepts on the design of spectrometers with improved performance.

Citation Download Citation

Yan-mei Kong, Jing-qiu Liang, Zhong-zhu Liang, Bo Wang, and Jun Zhang "Micro assembled Fourier transform spectrometer", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 728304 (20 May 2009); https://doi.org/10.1117/12.828282

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