Spin coating and plasma process for 2.5D and hybrid 3D micro-resonators on multilayer polymers

B. Bêche; E. Gaviot; C. Godet; A. Zebda; A. Potel; J. Barbe; L. Camberlein; V. Vié; P. Panizza; G. Loas; C. Hamel; J. Zyss; N. Huby

doi:10.1117/12.820339

18 May 2009 Spin coating and plasma process for 2.5D and hybrid 3D micro-resonators on multilayer polymers

B. Bêche, E. Gaviot, C. Godet, A. Zebda, A. Potel, J. Barbe, L. Camberlein, V. Vié, P. Panizza, G. Loas, C. Hamel, J. Zyss, N. Huby

Author Affiliations +

Proceedings Volume 7356, Optical Sensors 2009; 735606 (2009) https://doi.org/10.1117/12.820339
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

We have designed and realized three integrated photonic families of micro-resonators (MR) on multilayer organic materials. Such so-called 2.5D-MR and 3D-MR structures show off radius values ranging from 40 to 200μm. Both first and second families are especially designed on organic multilayer materials and shaped as ring- and disk-MR organics structures arranged upon (and coupled with) a pair of SU8-organic waveguides. The third family is related to hybrid 3D-MR structures composed of spherical glass-MR coupled to organic waveguides by a Langmuir-Blodgett lipid film about three nanometers in thickness. At first, polymer spin coating, surface plasma treatment and selective UV-lithography processes have been developed to realize 2.5D photonic micro-resonators. Secondly, we have designed and characterized photonic-quadripoles made of 3D-glass-MR arranged upon a pair of SU8 waveguides. Such structures are defined by a 4-ports or 4-waveguides coupled by the spherical glass-MR. We have achieved an evanescent photonic coupling between the 3D-MR and the 4-ports structure. Spectral resonances have been measured for 4-whispering gallery-modes (WGM) into such 3D-structures respectively characterized by a 0.97 nm free spectral range (FSR) and a high quality Q-factor up to 4.10⁴.

Citation Download Citation

B. Bêche, E. Gaviot, C. Godet, A. Zebda, A. Potel, J. Barbe, L. Camberlein, V. Vié, P. Panizza, G. Loas, C. Hamel, J. Zyss, and N. Huby "Spin coating and plasma process for 2.5D and hybrid 3D micro-resonators on multilayer polymers", Proc. SPIE 7356, Optical Sensors 2009, 735606 (18 May 2009); https://doi.org/10.1117/12.820339

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