Micro and nanophotonics in silicon: new perspectives and applications

Maurizio Casalino; Giuseppe Coppola; Principia Dardano; Luca De Stefano; Edoardo De Tommasi; Antonella Ferrara; Mariano Gioffrè; Mario Iodice; Vito Mocella; Ilaria Rea; Luigi Sirleto; Ivo Rendina

doi:10.1117/12.822676

20 May 2009 Micro and nanophotonics in silicon: new perspectives and applications

Maurizio Casalino, Giuseppe Coppola, Principia Dardano, Luca De Stefano, Edoardo De Tommasi, Antonella Ferrara, Mariano Gioffrè, Mario Iodice, Vito Mocella, Ilaria Rea, Luigi Sirleto, Ivo Rendina

Author Affiliations +

Proceedings Volume 7366, Photonic Materials, Devices, and Applications III; 736606 (2009) https://doi.org/10.1117/12.822676
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

In the last few years, silicon photonics has been characterized by a wide range of applications in several fields, from communications to sensing, from biophotonics to the development of new artificial materials. In this communication, we report a review of the main results obtained in our laboratories in design, fabrication and characterization of new silicon-based optical structures and devices, including metamaterials, photodetectors, raman light amplifiers, and porous silicon based bio-chemical sensors and biochips. Future perspectives in integration of silicon based MEMS and MOEMS are also presented.

Citation Download Citation

Maurizio Casalino, Giuseppe Coppola, Principia Dardano, Luca De Stefano, Edoardo De Tommasi, Antonella Ferrara, Mariano Gioffrè, Mario Iodice, Vito Mocella, Ilaria Rea, Luigi Sirleto, and Ivo Rendina "Micro and nanophotonics in silicon: new perspectives and applications", Proc. SPIE 7366, Photonic Materials, Devices, and Applications III, 736606 (20 May 2009); https://doi.org/10.1117/12.822676

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