Photothermal measurement of absorptance losses, temperature-induced wavefront deformation, and compaction in DUV optics

Bernd Schäfer; Bernhard Flöter; Klaus Mann

doi:10.1117/12.827501

17 June 2009 Photothermal measurement of absorptance losses, temperature-induced wavefront deformation, and compaction in DUV optics

Bernd Schäfer, Bernhard Flöter, Klaus Mann

Author Affiliations +

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73891D (2009) https://doi.org/10.1117/12.827501
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

A measurement system for quantitative registration of transient and irreversible lens effects in DUV optics induced by absorbed UV laser radiation was developed at the Laser-Laboratorium Göttingen. It is based upon a strongly improved Hartmann-Shack wavefront sensor with an extreme sensitivity of ~λ/10000 RMS @ 193nm, accomplishing precise online monitoring of wavefront deformations of a collimated test laser beam transmitted through the laser-irradiated site of a sample. Caused by the temperature dependence of the refractive index as well as thermal expansion and compaction, the initially plane wavefront of the test laser is distorted into a convex or concave lens, dependent on sign and magnitude of index change and expansion. The observed wavefront distortion yields a quantitative measure of the absorption losses in the sample. Some results for fused silica and CaF₂ are presented.

Citation Download Citation

Bernd Schäfer, Bernhard Flöter, and Klaus Mann "Photothermal measurement of absorptance losses, temperature-induced wavefront deformation, and compaction in DUV optics", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73891D (17 June 2009); https://doi.org/10.1117/12.827501

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available