The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM

Michael A. Helmbrecht; Min He; Carl J. Kempf; Patrick Rhodes

doi:10.1117/12.828384

11 August 2009 The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM

Michael A. Helmbrecht, Min He, Carl J. Kempf, Patrick Rhodes

Proceedings Volume 7466, Advanced Wavefront Control: Methods, Devices, and Applications VII; 74660E (2009) https://doi.org/10.1117/12.828384
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

Iris AO has been developing microelectromechanical systems (MEMS) based deformable mirrors (DM) for a number of years. This paper presents a review of the basic segmented DM design and shows test results of a 111-actuator, 37- piston/tip/tilt (PTT) segment DM. A 489-actuator 163-PTT-segment design is described as well as progress towards the fabrication of the device. A view to the future is shown by describing path-finding research towards 3000-actuator, 1000- PTT-segment DMs.

Citation Download Citation

Michael A. Helmbrecht, Min He, Carl J. Kempf, and Patrick Rhodes "The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM", Proc. SPIE 7466, Advanced Wavefront Control: Methods, Devices, and Applications VII, 74660E (11 August 2009); https://doi.org/10.1117/12.828384

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