Phase Measurements With A Type 2 Microscope

G. S. Kino; P. C.D. Hobbs; T. R. Corle

doi:10.1117/12.939846

20 April 1987 Phase Measurements With A Type 2 Microscope

G. S. Kino, P. C.D. Hobbs, T. R. Corle

Proceedings Volume 0749, Metrology: Figure and Finish; (1987) https://doi.org/10.1117/12.939846
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

We describe two ways which we have developed for obtaining phase information in Type 2 (confocal) microscopes: heterodyne interferometry using a Bragg cell for both scanning and frequency shifting, and a novel "heterodyne phase contrast" technique using a time-variable electro-optic phase plate, somewhat similar to a Zernike phase plate with mechanical scanning. The heterodyne interferometer can measure amplitude to 0.2% and phase to the 0.1° level at a rate of 30,000 to 50,000 points per second, with exel -lent vibration immunity. The heterodyne phase contrast system is slower, but is a single-beam system and could be retrofitted to a standard Type 2 system without affecting normal operation. If scan stage vibration can be neglected, for example in acoustic wave detection, it should be able to measure optical phase to around 0.1 millidegree; however, this accuracy is not yet demonstrated.

Citation Download Citation

G. S. Kino, P. C.D. Hobbs, and T. R. Corle "Phase Measurements With A Type 2 Microscope", Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); https://doi.org/10.1117/12.939846

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